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Patent Searching and Data


Title:
PIEZOELECTRIC VIBRATION CHIP, ITS MANUFACTURING METHOD, AND PIEZOELECTRIC DEVICE UTILIZING THE PIEZOELECTRIC VIBRATION CHIP ELEMENT
Document Type and Number:
Japanese Patent JP2006311444
Kind Code:
A
Abstract:

To provide a piezoelectric vibration chip which is excellent in mass productivity and the frequency of which is adjusted highly precisely, and to provide a its manufacturing method and a piezoelectric device utilizing the piezoelectric vibration chip.

The piezoelectric vibration chip is provided with weights 62 located at regions ER1, ER2, ER3, ER4 to which laser beams are respectively emitted for frequency adjustment, each of the weights 62 includes a region for roughly adjusting the frequency and a region for fine-adjusting the frequency relatively, and the region for roughly adjusting the frequency is formed to have a greater mass than that of the region for fine-adjusting the frequency relatively.


Inventors:
KUWABARA TAKAO
Application Number:
JP2005134348A
Publication Date:
November 09, 2006
Filing Date:
May 02, 2005
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/19; H01L41/09; H01L41/18; H01L41/22; H01L41/23; H01L41/253; H03H3/02; H03H3/04; H03H9/02; H03H9/215
Attorney, Agent or Firm:
岡▲崎▼ 信太郎
Arai Zen