To provide a piezoelectric vibration piece allowed to be constituted as a miniaturized piece and capable of stably generating a comparatively low frequency.
The piezoelectric vibrating piece provided with a base part 21 formed by a base material having a small Young's modulus and a fine frequency-temperature characteristic and at least a pair of vibration arms 22, 23 formed integrally with the base part 21 by the same material and extended from the base part in parallel includes first electrodes 26, 27 respectively formed on both the side edges on the surface of the vibration arms 22, 23 and having mutually different poles, piezoelectric thin films 24, 25 formed on the surfaces of the first electrodes 26, 27 and second electrodes 28, 29 formed on the surfaces of the piezoelectric thin films 24, 25 so as to make a pair with the first electrodes 26, 27 while sandwiching the piezoelectric thin film.
| JP2003227719A | 2003-08-15 | |||
| JPS56136016A | 1981-10-23 | |||
| JPS5330893A | 1978-03-23 | |||
| JPS5343490A | 1978-04-19 | |||
| JPS53116797A | 1978-10-12 | |||
| JP2004061486A | 2004-02-26 | |||
| JP2001235331A | 2001-08-31 | |||
| JP2001221638A | 2001-08-17 | |||
| JP2005345416A | 2005-12-15 | |||
| JP2005172542A | 2005-06-30 |
Osamu Suzawa
Kazuhiko Miyasaka
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