Title:
ピッチ変換ユニット
Document Type and Number:
Japanese Patent JP4915792
Kind Code:
B2
Inventors:
Munehiro Yamashita
Application Number:
JP2006336455A
Publication Date:
April 11, 2012
Filing Date:
December 14, 2006
Export Citation:
Assignee:
Nidec Read Corporation
International Classes:
H01L21/66; G01R1/073
Domestic Patent References:
| JP2005061851A | ||||
| JP2000321303A | ||||
| JP2001013166A |
Attorney, Agent or Firm:
Hideaki Kitamura