Title:
平面研磨方法および平面研磨装置
Document Type and Number:
Japanese Patent JP3582026
Kind Code:
B2
Inventors:
Fumitoshi Sugimoto
Application Number:
JP18518695A
Publication Date:
October 27, 2004
Filing Date:
July 21, 1995
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/3205; H01L21/304; H01L21/768; (IPC1-7): H01L21/304; H01L21/3205; H01L21/768
Domestic Patent References:
| JP8321479A | ||||
| JP8281551A | ||||
| JP8203861A | ||||
| JP7297152A | ||||
| JP7130690A | ||||
| JP6320413A |
Attorney, Agent or Firm:
Manabe Kiyoshi
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito