Title:
プラズマCVDによる成膜方法、電子放出源、電界放射型ディスプレイおよび照明ランプ
Document Type and Number:
Japanese Patent JP4737672
Kind Code:
B2
Inventors:
Hirooki Wang
Gangnam
Hirohisa Hiraki
Gangnam
Hirohisa Hiraki
Application Number:
JP2005181069A
Publication Date:
August 03, 2011
Filing Date:
June 21, 2005
Export Citation:
Assignee:
Purelon Japan Co., Ltd.
International Classes:
C23C16/27; C01B31/02; C30B29/04; H01J1/304; H01J31/12; H01J63/06
Domestic Patent References:
| JP2006179457A | ||||
| JP6316488A | ||||
| JP6271398A |
Attorney, Agent or Firm:
Kazuhide Okada