Title:
イオン注入の生産性向上のためのＧｅＨ４／Ａｒプラズマ化学
Document Type and Number:
Japanese Patent JP7144610
Kind Code:
B2
Abstract:
A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.
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Inventors:
Kuu, Bon-Un
Sarajurik, Ajudin
Johnson, Ronald
Carbon, Nungio buoy.
Ewing, Peter
Deagan, Marvin
Sarajurik, Ajudin
Johnson, Ronald
Carbon, Nungio buoy.
Ewing, Peter
Deagan, Marvin
Application Number:
JP2021522964A
Publication Date:
September 29, 2022
Filing Date:
October 01, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01J27/08; H01J27/16; H01J37/08
Domestic Patent References:
| JP2010267623A | ||||
| JP2011066022A | ||||
| JP2013165254A | ||||
| JP2013506962A | ||||
| JP2013521596A | ||||
| JP2014216311A |
Foreign References:
| US20080075880 | ||||
| US20160046849 | ||||
| US20160163510 | ||||
| US20170292186 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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