Title:
PLASMA ARC DECOMPOSING METHOD FOR CHLOROFLUOROCARBON AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3928018
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To contrive simplification of operation and reduction of running cost by arranging an anode nozzle from the outer periphery of a plasma restraining nozzle of the outer periphery of an electrode to below and decomposing chlorofluorocarbon by a plasma jet formed of a plasma arc generated by feeding plasma gas between the electrode and the plasma locking nozzle and prescribed gas.
SOLUTION: After gas 4 forming a plasma jet 3j is fed to between a plasma restraining nozzle 13 and plasma gas 1 is fed between an electrode 12 and the plasma restraining nozzle 13, a start electric current Is is made to flow to generate a pilot arc. Voltage is applied to between the hafnium electrode 12 and the anode nozzle 14 to cause a plasma arc current Ip to flow from the plasma restraining nozzle 13 to the anode nozzle 14 and generate a plasma arc 3a. Chlorofluorocarbon 5 is made to flow through the plasma jet 3j at a rate at which it is to be subjected to decomposition reaction, and is decomposed, and water or steam 6 and then calcium hydroxide are added to it to neutralize and make it harmless. As a result, operation can be simplified and cost can be lowered by lessening consumption of the anode nozzle 14.
Inventors:
Zenjiro Osawa
Shinichi Kuroda
Kusumoto Kazuomi
Nakanishi Yasumasa
Doi Yasuo
Yoneda Kohei
Hideyuki Yamamoto
Toshihiko Okada
Fumihiko Nakatani
Atsushi Okubo
Shinichi Kuroda
Kusumoto Kazuomi
Nakanishi Yasumasa
Doi Yasuo
Yoneda Kohei
Hideyuki Yamamoto
Toshihiko Okada
Fumihiko Nakatani
Atsushi Okubo
Application Number:
JP8451697A
Publication Date:
June 13, 2007
Filing Date:
March 17, 1997
Export Citation:
Assignee:
Daihen Co., Ltd.
Zenjiro Osawa
Shinichi Kuroda
Zenjiro Osawa
Shinichi Kuroda
International Classes:
B01D53/70; A62D3/00; B01J19/08; C07B35/06; C07B61/00; H05H1/42; (IPC1-7): B01D53/70; A62D3/00; B01J19/08; H05H1/42; //C07B35/06; C07B61/00
Domestic Patent References:
| JP9150055A | ||||
| JP6142452A | ||||
| JP3090172A | ||||
| JP7019437A | ||||
| JP48016885B1 | ||||
| JP8318129A | ||||
| JP58045718A | ||||
| JP2107387A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
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