Title:
プラズマ被膜表面仕上げの方法及び装置
Document Type and Number:
Japanese Patent JP4082905
Kind Code:
B2
Abstract:
A method for coating surfaces, for which a precursor material is caused to react with the help of plasma and the reaction product is deposited on a surface, the reaction as well as the deposition taking place at atmospheric pressure, such that a plasma jet is generated by passing a working gas through an excitation zone and the precursor material is supplied with a lance separately from the working gas to the plasma jet.
Inventors:
Founsel, peter
Busuke, Christian
Hartmann, Uwe
Burman, Alfred
Elingoust, guide
Bithing, Claus-D.
Busuke, Christian
Hartmann, Uwe
Burman, Alfred
Elingoust, guide
Bithing, Claus-D.
Application Number:
JP2001535626A
Publication Date:
April 30, 2008
Filing Date:
March 17, 2000
Export Citation:
Assignee:
PlasmaTreat GmbH
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
International Classes:
C23C16/505; B05C9/12; B05D1/08; B05D3/04; C23C4/12; C23C4/134; C23C8/36; C23C16/513; H05H1/30; H05H1/34; H05H1/42
Domestic Patent References:
| JP63252567A | ||||
| JP3068469A | ||||
| JP4502937A | ||||
| JP8224662A |
Foreign References:
| WO1999042637A1 | ||||
| WO1999020809A1 | ||||
| US5109150 |
Attorney, Agent or Firm:
Takao Koshikawa
Hitoshi Maeda
Shingo Nishide
Koichiro Okura
Hitoshi Maeda
Shingo Nishide
Koichiro Okura