PURPOSE: To uniformly energize plasma with respect to a substrate by placing a means of forming a magnetic field in a direction in which plasma is led to the substrate and a means of forming a magnetic field which is perpendicular to the substrate and has uniform magnetic flux density over the whole surface of the substrate.
CONSTITUTION: A plasma controller is composed of a first magnetic field forming means 2 to form a magnetic field in which plasma 4 is led to a substrate 1 by lines of magnetic force and of a second magnetic field forming means 3 form a magnetic field having lines of magnetic force which are perpendicular to the surface of the substrate 1 and having nearly uniform magnetic flux density over the whole surface of the substrate 1. Plasma 4 is transferred downward by lines of magnetic force 2a from the first magnetic field forming means 2 and charged particles such as ions or electrons are spirally moved by lines of magnetic force 3a from the second magnetic field forming means 3. Thus, the plasma 4 is brought into uniform contact with the substrate 1 and a film of a uniform thickness is efficiently formed.
SUGATA HIROYUKI
KIMURA TOSHIAKI
KURIHARA NORIKO
DEN TORU
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