Title:
PLASMA CVD DEVICE
Document Type and Number:
Japanese Patent JP2015199991
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a plasma CVD device enabled to suppress the occurrence of an abnormal discharge due to the fact that parts for playing the role of a conductor wire for supplying an electric power source are deformed by thermal expansion.SOLUTION: A plasma CVD device 1 comprises: a connection member 4 connecting a power-receiving electrode 2 and a power feeding electrode 3 and having a heat deformation absorption part 5 for absorbing the deformation of the connection member 4 at the time of a thermal expansion; first insulators 6 for insulating the power-receiving electrode 2 and the power feeding electrode 3 electrically; and second insulators 7 having support parts 8 for supporting the individual base end parts 2a and 3a of the power-receiving electrode 2 and the power feeding electrode 3 and connected in a socket and spigot joint to the first insulators 6.
Inventors:
KUNO HIROHIKO
Application Number:
JP2014079776A
Publication Date:
November 12, 2015
Filing Date:
April 08, 2014
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
C23C16/503
Domestic Patent References:
| JP2013115281A | 2013-06-10 | |||
| JP2004011021A | 2004-01-15 | |||
| JP2013237886A | 2013-11-28 | |||
| JPH0651265U | 1994-07-12 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Toshifumi Onuki
Akihiko Eguchi