Title:
PLASMA DEVICE
Document Type and Number:
Japanese Patent JPS58157095
Kind Code:
A
Inventors:
KAGEYAMA KATSUHIRO
Application Number:
JP3815382A
Publication Date:
September 19, 1983
Filing Date:
March 12, 1982
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H05H1/16; (IPC1-7): H05H1/16
Attorney, Agent or Firm:
Noriyuki Noriyuki