Title:
Plasma etching method
Document Type and Number:
Japanese Patent JP6045646
Kind Code:
B2
Inventors:
Kinnobu Oya
Akira Tanabe
Yoshinori Yasuda
Akira Tanabe
Yoshinori Yasuda
Application Number:
JP2015118313A
Publication Date:
December 14, 2016
Filing Date:
June 11, 2015
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H05H1/46
Domestic Patent References:
| JP2008244429A | ||||
| JP2007503709A | ||||
| JP2007157696A | ||||
| JP2007516622A | ||||
| JP2003332321A | ||||
| JP2008053507A |
Foreign References:
| US20090142859 |
Attorney, Agent or Firm:
Seishin ip patent business corporation
Filial piety Sasaki
Filial piety Sasaki