PURPOSE: To reduce the rising time of a discharge, improve various characteristics of initial plasma, and obtain the extreme ultraviolet light with little dispersion and high intensity by providing a cylindrical insulator made of fine ceramic or the like of a device generating the ultraviolet light on the inside of an outside cylinder electrode.
CONSTITUTION: A cylinder insulator 30 is inserted between the inside cylinder electrode 10 made of a conductor and the outside cylinder electrode 20 of a plasma extreme ultraviolet light generator, the high voltage is applied from a capacitor 50 to generate a capacitor pulse discharge. The gas corresponding to the usage objective such as Ne is sealed in a vacuum container 40. Plasma is self-heated by a large current generated by this discharge, plasma is pinched to generate the extreme ultraviolet light, it is guided into a reaction chamber 120 through a beryllium window 9 and reacted with a sample 130 to form a pattern. The rising time of the discharge is reduced, high intensity of the electron density is obtained, various characteristics of initial plasma are improved.
OCHIAI ISAO
SATO TOSHIHIKO
KATO YASUO
MURAYAMA SEIICHI
