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Title:
PLASMA GENERATING BODY AND PLASMA GENERATING DEVICE
Document Type and Number:
Japanese Patent JP2013080697
Kind Code:
A
Abstract:

To provide a plasma generating body capable of making suitable distribution and flow of plasma in a discharge space.

A plasma generating body 1 has a common electrode 5, an electrode 7 for plasma opposed to the common electrode 5 across a discharge space 11, and an electrode 9 for ion wind positioned on the common electrode 5 side to the discharge space 11. The common electrode 5 is positioned on one side in a direction crossing with a direction opposite to the common electrode 5 and the electrode 7 for plasma (positive side in an x-direction) relative to the electrode 9 for ion wind. The plasma generating body 1 can generate plasma to the discharge space 11 by applying a voltage between the common electrode 5 and the electrode 7 for plasma, and can generate ion wind flowing to the positive side in the x-direction by applying a voltage between the common electrode 5 and the electrode 9 for ion wind.


Inventors:
YAGI TAKASHIGE
TOJO TETSUYA
MAKINO HIROSHI
Application Number:
JP2012185407A
Publication Date:
May 02, 2013
Filing Date:
August 24, 2012
Export Citation:
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Assignee:
KYOCERA CORP
International Classes:
H05H1/24
Domestic Patent References:
JP2007317656A2007-12-06
JP2008293925A2008-12-04
JP2008001354A2008-01-10
JPS60118256A1985-06-25
JPS4847790A1973-07-06
JPS6318371A1988-01-26
JP2010232005A2010-10-14
Attorney, Agent or Firm:
Takahisa Sato