To provide a plasma generation apparatus, which has a high efficiency of transporting a plasma and a high efficiency of removing droplets and is manufactured at a relatively low cost.
The plasma generation apparatus 1 includes: a plasma generation section 2 for generating a plasma from a cathode target 3; and a plasma traveling path 4 having a first plasma traveling path 7 and a second plasma traveling path 9 through which the plasma travels; wherein a plurality of shielding plates 12 for sticking droplets 30 are provided in an inner wall. In the plasma generation apparatus 1, a terminal reflection wall 31 opposed to the straight traveling direction of the plasma is provided at the terminal of the first plasma traveling path 7, the second plasma traveling path 9 is bent and connected to the first plasma traveling path 7 along the terminal reflection wall 31, and the plurality of shielding plates are arranged in the terminal reflection wall 31 to reflect and/or adsorb the droplets.
SUKAGAWA TOMOO
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