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Title:
PLASMA GENERATION APPARATUS HAVING TERMINAL REFLECTION WALL FILTER AND PLASMA PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2012067352
Kind Code:
A
Abstract:

To provide a plasma generation apparatus, which has a high efficiency of transporting a plasma and a high efficiency of removing droplets and is manufactured at a relatively low cost.

The plasma generation apparatus 1 includes: a plasma generation section 2 for generating a plasma from a cathode target 3; and a plasma traveling path 4 having a first plasma traveling path 7 and a second plasma traveling path 9 through which the plasma travels; wherein a plurality of shielding plates 12 for sticking droplets 30 are provided in an inner wall. In the plasma generation apparatus 1, a terminal reflection wall 31 opposed to the straight traveling direction of the plasma is provided at the terminal of the first plasma traveling path 7, the second plasma traveling path 9 is bent and connected to the first plasma traveling path 7 along the terminal reflection wall 31, and the plurality of shielding plates are arranged in the terminal reflection wall 31 to reflect and/or adsorb the droplets.


Inventors:
SAGISAKA KEISUKE
SUKAGAWA TOMOO
Application Number:
JP2010212900A
Publication Date:
April 05, 2012
Filing Date:
September 22, 2010
Export Citation:
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Assignee:
FERROTEC CORP
International Classes:
C23C14/00; C23C14/34; H05H1/48
Domestic Patent References:
JP2002008893A2002-01-11
JP2008248347A2008-10-16
JP2001521066A2001-11-06
JP2005187864A2005-07-14
JPH10505633A1998-06-02
JP2007009303A2007-01-18
JP2004244667A2004-09-02
JP2007046144A2007-02-22
Attorney, Agent or Firm:
Hisami Miki