Title:
PLASMA GENERATOR
Document Type and Number:
Japanese Patent JP2020017419
Kind Code:
A
Abstract:
To provide a plasma generator which can radiate plasma to a wide area without making a damage by a current and causing the problem of pollution by an electrode material.SOLUTION: The plasma generator according to the present invention includes: flow channel forming parts 11, 12 each forming a flow channel to circulate gas along a predetermined circulation direction and having an opening to discharge gas to the end part of the flow channel on the downstream side; a pair of first electrodes 13 oppositely arranged across the flow channel; a pair of second electrodes 14 oppositely arranged apart from the first electrode in the circulation direction across the flow channel; and a power supply unit 15 which applies an AC voltage between the first and second electrodes. Each of the pair of first electrodes has an opposite plane which is opposite to the other first electrode and in parallel to the circulation direction, and each of the pair of second electrodes has an opposite plane which is opposite to the other second electrode and in parallel to the circulation direction. The opposite plane of the first electrode and the flow channel, as well as the opposite plane of the second electrode and the flow channel are isolated from each other by dielectrics.SELECTED DRAWING: Figure 1
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Inventors:
HORIKOSHI AKIRA
NAKAMURA SHOHEI
TAKATSUJI SHIGERU
KONO MOTOHIRO
NAKAMURA SHOHEI
TAKATSUJI SHIGERU
KONO MOTOHIRO
Application Number:
JP2018139928A
Publication Date:
January 30, 2020
Filing Date:
July 26, 2018
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
H05H1/24; B01J19/08
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi
Kazumasa Onishi