Title:
プラズマ処理装置及びプラズマ処理方法
Document Type and Number:
Japanese Patent JP4969595
Kind Code:
B2
Inventors:
Shogo Okita
Hiromi Asakura
Shozo Watanabe
Ryuzo Hochin
Hiroyuki Suzuki
Hiromi Asakura
Shozo Watanabe
Ryuzo Hochin
Hiroyuki Suzuki
Application Number:
JP2009019862A
Publication Date:
July 04, 2012
Filing Date:
January 30, 2009
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/3065; C23C16/458; H01L21/205; H01L21/683
Domestic Patent References:
| JP7335616A | ||||
| JP2004273533A | ||||
| JP2004259826A | ||||
| JP2001230234A | ||||
| JP2005277369A | ||||
| JP2007109770A |
Attorney, Agent or Firm:
Mitsuo Tanaka
Samejima Mutsumi
Atsushi Maeda
Yoshiyuki Maebori
Samejima Mutsumi
Atsushi Maeda
Yoshiyuki Maebori