Title:
プラズマ処理装置およびプラズマ処理方法
Document Type and Number:
Japanese Patent JP6567943
Kind Code:
B2
Inventors:
Takao Arase
Masashi Mori
Kenetsu Yokokawa
Yusuke Takekawa
Takamasa Ichino
Masashi Mori
Kenetsu Yokokawa
Yusuke Takekawa
Takamasa Ichino
Application Number:
JP2015200701A
Publication Date:
August 28, 2019
Filing Date:
October 09, 2015
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/3065; H01L21/683; H02N13/00; H05H1/46
Domestic Patent References:
| JP2014533436A | ||||
| JP2014096594A | ||||
| JP2011061048A | ||||
| JP2002527887A | ||||
| JP2012129429A |
Attorney, Agent or Firm:
Tsutsui International Patent Office