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Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4598984
Kind Code:
B2
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Inventors:
Masahito Tashiro
Hiroshi Okumura
Application Number:
JP2001119717A
Publication Date:
December 15, 2010
Filing Date:
April 18, 2001
Export Citation:
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Assignee:
FO Corporation
International Classes:
H01L21/677; H05H1/46; B65G49/06; B65G49/07; H01L21/205; H01L21/302; H01L21/3065; H01L21/68
Domestic Patent References:
JP11091943A
JP11238785A
Attorney, Agent or Firm:
Naoki Kubota



 
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