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Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4969259
Kind Code:
B2
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Inventors:
Takumi Tanto
Kenetsu Yokokawa
Masaru Izawa
Application Number:
JP2007020305A
Publication Date:
July 04, 2012
Filing Date:
January 31, 2007
Export Citation:
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Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/3065
Domestic Patent References:
JP2006522452A
JP2002217178A
Foreign References:
WO2004025199A1
Attorney, Agent or Firm:
Manabu Inoue



 
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