Title:
工作物のプラズマ処理方法および装置
Document Type and Number:
Japanese Patent JP4512485
Kind Code:
B2
Abstract:
Disclosed are a method and a device for plasma treating workpieces (5). The workpiece is inserted into a chamber (4) of a treatment station (3), which can be at least partly evacuated, and is positioned within said treatment station by means of a holding element. A connection of the chamber to at least one unit supplying operating means is controlled by a valve block (54) which comprises at least two valves (59, 60, 61) and is disposed near a floor (29) of the chamber.
Inventors:
Ritzenberg Michael
Levin Frank
Muller Hardwig
Vogel Claus
Arnold Gregor
Bere stephan
Lütrinkhaus Henkel Andreas
Vicker Matthias
Klein Jurgen
Levin Frank
Muller Hardwig
Vogel Claus
Arnold Gregor
Bere stephan
Lütrinkhaus Henkel Andreas
Vicker Matthias
Klein Jurgen
Application Number:
JP2004507561A
Publication Date:
July 28, 2010
Filing Date:
May 09, 2003
Export Citation:
Assignee:
Carhares Corpoplast Gaem Behr und Company Carga
International Classes:
H05H1/46; B08B7/00; B08B9/42; B29C49/42; B65D1/00; B65D23/02; B65G29/00; C03C17/00; C08G83/00; C08J7/00; C08J9/00; C23C14/04; C23C14/50; C23C14/56; C23C16/04; C23C16/40; C23C16/44; C23C16/455; C23C16/458; C23C16/511; C23C16/54; B05D7/24; C08L101/00
Domestic Patent References:
| JP8509166A | ||||
| JP2001351907A | ||||
| JP2001515539A |
Foreign References:
| WO1999017334A1 | ||||
| DE924065B | ||||
| WO2000058631A1 | ||||
| WO1995022413A1 | ||||
| EP1010773A1 |
Attorney, Agent or Firm:
Fujita Akira