Title:
プラズマ処理方法
Document Type and Number:
Japanese Patent JP4143176
Kind Code:
B2
Inventors:
Hiroyuki Ishihara
Gohei Kawamura
Gohei Kawamura
Application Number:
JP22368798A
Publication Date:
September 03, 2008
Filing Date:
July 23, 1998
Export Citation:
Assignee:
Tokyo Electron at Co., Ltd.
Japan Science and Technology Agency
Japan Science and Technology Agency
International Classes:
H01L21/3065; H05H1/00; C23F4/00; H01L21/302; H05H1/46
Domestic Patent References:
| JP9162175A | ||||
| JP9022900A | ||||
| JP6295883A | ||||
| JP6053179A | ||||
| JP8335565A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Tetsuo Kanamoto