Title:
プラズマ処理方法
Document Type and Number:
Japanese Patent JP6982837
Kind Code:
B2
Abstract:
Provided is a plasma processing method which comprises steps of preparing a conveying carrier including a holding sheet and a frame provided on a peripheral region of the holding sheet, adhering the substrate on the holding sheet in an inner region inside the peripheral region to hold the substrate on the conveying carrier, sagging the holding sheet in the inner region, setting the conveying carrier on a stage provided within a plasma processing apparatus to contact the holding sheet on the stage so that the holding sheet in the inner region touches the stage before the holding sheet in the peripheral region does, and plasma processing the substrate.
Inventors:
Shogo Okita
Atsushi Harai
Akihiro Ito
Matsubara Noriyuki
Atsushi Harai
Akihiro Ito
Matsubara Noriyuki
Application Number:
JP2017203058A
Publication Date:
December 17, 2021
Filing Date:
October 20, 2017
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01L21/3065; H01L21/301; H01L21/683
Domestic Patent References:
| JP2016195151A | ||||
| JP2013004666A | ||||
| JP2014513868A | ||||
| JP2016195150A |
Attorney, Agent or Firm:
Kawasaki/Hashimoto Patent Office
Shinichi Kawasaki
Yuko Tsumura
Shozo Yamashita
Kaoru Hashimoto
Shinichi Kawasaki
Yuko Tsumura
Shozo Yamashita
Kaoru Hashimoto
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