Title:
相及び応力制御を使用したプラズマ溶射コーティング設計
Document Type and Number:
Japanese Patent JP7033919
Kind Code:
B2
Abstract:
An article includes a body having a plasma-sprayed ceramic coating on a surface thereof. The body can be formed of at one least one of the following materials: Al, Al2O3, AlN, Y2O3, YSZ, or SiC. The plasma-sprayed ceramic coating can include at least one of Y2O3, Y4Al2O9, Y3Al5O12 or a solid-solution of Y2O3 mixed with at least one of ZrO2, Al2O3, HfO2, Er2O3, Nd2O3, Nb2O5, CeO2, Sm2O3 or Yb2O3. The plasma-sprayed ceramic coating can further include splats.
More Like This:
Inventors:
San Jennifer Wye
Chen Yi Kai
Kanungo Villaja Prasad
Chen Yi Kai
Kanungo Villaja Prasad
Application Number:
JP2017512875A
Publication Date:
March 11, 2022
Filing Date:
May 15, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C4/11; C23C4/134; H01L21/3065
Domestic Patent References:
| JP2008045211A | ||||
| JP2011117012A | ||||
| JP2005097722A | ||||
| JP2015530737A | ||||
| JP2015522710A | ||||
| JP2009068066A | ||||
| JP2009068067A | ||||
| JP2005521868A | ||||
| JP2004091269A | ||||
| JP2005534814A |
Foreign References:
| US20140030486 | ||||
| US20130143037 | ||||
| US20030185965 | ||||
| WO2014018830A1 | ||||
| WO2013162909A1 |
Attorney, Agent or Firm:
Yoshiaki Anzai
Previous Patent: Cubicle management system
Next Patent: Cellulose nanofiber dispersion liquid and its manufacturing method
Next Patent: Cellulose nanofiber dispersion liquid and its manufacturing method