Title:
PLASMA TORCH
Document Type and Number:
Japanese Patent JP2006100078
Kind Code:
A
Abstract:
To provide a plasma torch which does not generate an outgas even in a super-high vacuum environment, and which is commonly usable as a migrating type and a nonmigrating type.
This plasma torch has a conductive anode 10 of a nearly cylindrical shape, an insulating tube 20 composed of silica or machinable ceramics inserted into the inside of the anode 10, and a rod shaped cathode 30 inserted into the inside of the insulating tube 20 so as not to be contacted with the anode 10, and has a constitution that the plasma is formed by respectively applying a positive voltage and a negative voltage to the anode 10 and the cathode 30.
Inventors:
YUMOTO ATSUSHI
NIWA NAOKI
SHIODA KAZUMICHI
YOSHITANI SHIWA
KIKUCHI KAZUHIKO
SATO TATSUSHI
WATANABE MASAHARU
NIWA NAOKI
SHIODA KAZUMICHI
YOSHITANI SHIWA
KIKUCHI KAZUHIKO
SATO TATSUSHI
WATANABE MASAHARU
Application Number:
JP2004283819A
Publication Date:
April 13, 2006
Filing Date:
September 29, 2004
Export Citation:
Assignee:
TAMA TLO KK
International Classes:
H05H1/34; H05B7/18; C23C4/00; C23C14/24
Domestic Patent References:
| JP2004137803A | 2004-05-13 | |||
| JPH05144593A | 1993-06-11 | |||
| JP2000282243A | 2000-10-10 | |||
| JPH06200360A | 1994-07-19 | |||
| JPS6353376U | 1988-04-09 | |||
| JPH11285834A | 1999-10-19 | |||
| JPS6330180A | 1988-02-08 |
Foreign References:
| WO1986002024A1 | 1986-04-10 |
Attorney, Agent or Firm:
Takahisa Sato