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Patent Searching and Data


Title:
PLASMA TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2003033647
Kind Code:
A
Abstract:

To provide a plasma treatment device capable of efficiently treating a work without increasing the size of the entire device.

In the plasma treatment device in which a plasma generating coil is provided around a plasma generating outer chamber connected to a gas introduction unit for generating plasma, and a treatment chamber is disposed below the plasma generating outer chamber, an inner chamber having the sectional area smaller than that of the plasma generating outer chamber is provided inside the plasma generating outer chamber in a coaxial manner with the plasma generating outer chamber.


Inventors:
OBUCHI KAZUTO
Application Number:
JP2001221048A
Publication Date:
February 04, 2003
Filing Date:
July 23, 2001
Export Citation:
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Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
H05H1/46; B01J19/08; C23C16/507; H01J37/32; H01L21/00; H01L21/302; H01L21/3065; (IPC1-7): B01J19/08; C23C16/507; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Yu Koyama