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Title:
PLASMA TREATMENT DEVICE
Document Type and Number:
Japanese Patent JPH10321607
Kind Code:
A
Abstract:

To provide a batch type plasma treatment device which can perform treatment while keeping a heating temperature on the surface of each body to be treated and between bodies to be treated treated uniform.

In a batch type plasma treatment device for treating a plurality of boards W to be treated at once by putting a treatment boat 2, whereon a plurality of treated boards W such as semiconductor wafers are mounted inside a treatment chamber, a heating wire heater 8 for heating each treated board W is laid in a treated body mounting part 2a of the treatment body boat 2. Since each treated board W can be directly heated from a lower surface by the wire heater 8, treatment is possible while keeping a heating temperature on a surface of a each treated board W and between treated boards W uniform regardless of a position on the treated body boat 2, etc. It is applicable to a batch type plasma etching device, a plasma chemical vapor deposition device, etc.


Inventors:
FUJIMOTO TAKAAKI
HIROSE TAISEI
Application Number:
JP14733897A
Publication Date:
December 04, 1998
Filing Date:
May 21, 1997
Export Citation:
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Assignee:
RICOH KK
International Classes:
H05H1/46; C23C16/50; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): H01L21/3065; C23C16/50; C23F4/00; H01L21/205; H01L21/31; H05H1/46



 
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