Title:
PLATE CLEANING DEVICE AND PLATE CLEANING METHOD
Document Type and Number:
Japanese Patent JP2020179359
Kind Code:
A
Abstract:
To excellently clean a plate having a first main surface with silver nanoparticles adhered.SOLUTION: A plate cleaning device includes: a liquid film forming part which supplies a first cleaning liquid from a first nozzle to a first main surface of a plate rotated by rotation of a holding part by a rotation part, forms a liquid film of the first cleaning liquid on the entire first main surface, and makes silver nanoparticles float from the first main surface; and a fluid cleaning part which performs fluid cleaning processing to the first main surface of the plate with the liquid film formed by the liquid film forming part. The fluid cleaning part removes the silver nanoparticles floated from the first main surface from the plate by discharging a mixed fluid with gas and a second cleaning liquid mixed or the second cleaning liquid from a second nozzle to the liquid film formed on the plate and moving the second nozzle to an outer side from a rotation center of the plate in a state that the plate is rotated by the rotation of the holding part by the rotation part.SELECTED DRAWING: Figure 2A
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Inventors:
KAJINO KAZUKI
YANAGIDA TAKAAKI
SHOJI KAZUHIRO
YANAGIDA TAKAAKI
SHOJI KAZUHIRO
Application Number:
JP2019085001A
Publication Date:
November 05, 2020
Filing Date:
April 26, 2019
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
B08B3/02; B08B1/04; B41F35/00
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi
Kazumasa Onishi