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Title:
PLATE-LIKE COIL, TOROIDAL COIL STRUCTURE, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP2005032574
Kind Code:
A
Abstract:

To provide a plate-like coil where coils can be easily aligned with high accuracy, when assembling a coil structure.

A toroidal coil assembly comprises a cylindrical member having a plurality of grooves, extending in its longitudinal direction on the outer surface; and a plate-like member which is fitted into the cylindrical member so that at least one surface becomes perpendicular with respect to the axial direction of the cylindrical member, and has a plurality of grooves extending radially around the intersection with the axis of the cylindrical member. The plate-like coil which is inserted into the groove in the toroidal coil assembly and arranged radially with respect to the axis of the toroidal coil assembly, is characterised by being provided with a board member where the coils are formed on both sides; and positioning protrusions which are formed on at least one side of this board member and adjust the relative position, in between the cylindrical member or the plate-like member and the coils, by abutting shoulders of the grooves of the cylindrical member or the plate-like member, when inserted.


Inventors:
TOMITA YASUHISA
NAKANO KATSUSHI
KAKIZAKI YUKIO
SUZUKI KAZUTO
Application Number:
JP2003271113A
Publication Date:
February 03, 2005
Filing Date:
July 04, 2003
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G03F7/20; H01J37/147; H01J37/153; H01J37/305; H01L21/027; (IPC1-7): H01J37/147; G03F7/20; H01J37/153; H01J37/305; H01L21/027
Attorney, Agent or Firm:
Furuya Fumio