To provide a plating bath and a method for depositing a uniform and high-gloss metal layer having excellent physical-mechanical properties, on a substrate.
The metal plating bath includes hetero-atom containing organic compounds that can prevent the degradation of a plating-bath additive and have the following formula: R1-X-R2, (wherein X is -S(O)n-S(O)p-S(O)q-S(O)u-S(O)v-S(O)w-, -(S(O)z)m-(CH2)y-(S(O)z')m'-, or -SO2-S-(CH2)y-S-SO2-, wherein n, p, q, u, v, w, z and z' are each independently an integer of from 0 to 2, m and m' are independently an integer of from 1 to 6, and y is an integer of from 2 to 4, or X is a hetero atom selected from S, O, and N, or N substituted with (C1-C6) alkyl or a tosyl group, and R1 and R2 may be taken together along with the atoms, to which they are attached, to form a 5 to 18 membered heterocyclic ring).
KAPECKAS MARK J
REDDINGTON ERIK
SONNENBERG WADE
BARSTAD LEON R
BUCKLEY THOMAS
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