Title:
PNEUMATIC PROBE SENSOR AND PRECISION MEASURING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2001208534
Kind Code:
A
Abstract:
To provide a pneumatic probe sensor and a measuring apparatus using the same which enable accurate measurement of an object with a limited error in a probe sensor for measurement and moreover, allow measurement even when a part to be measured is a minimal diameter of a bottomed hole and at a narrow place as well.
Changes in air pressure are detected by a feeler 11 to accomplish a detection in probing.
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Inventors:
TAKAO KIYOTOSHI
Application Number:
JP2000019465A
Publication Date:
August 03, 2001
Filing Date:
January 28, 2000
Export Citation:
Assignee:
YAMANASHI PREFECTURE
International Classes:
G01B11/00; G01B13/10; G01B13/16; G01B21/00; G01B21/14; G01B21/20; (IPC1-7): G01B21/20; G01B11/00; G01B13/10; G01B13/16
Domestic Patent References:
| JPS6120802A | 1986-01-29 | |||
| JP2000155002A | 2000-06-06 | |||
| JPS4826162A | 1973-04-05 | |||
| JPS5614109A | 1981-02-10 | |||
| JPS6120802A | 1986-01-29 | |||
| JP2000155002A | 2000-06-06 | |||
| JPS4826162A | 1973-04-05 | |||
| JPS5614109A | 1981-02-10 | |||
| JPS6138508U | 1986-03-11 |
Other References:
JPN6010026850, 高尾清利 他３名, "微小円筒形状測定技術と装置の開発", 山梨県工業技術センター研究報告, 1999, Ｎｏ．１３, Ｐ．１−４, JP
Attorney, Agent or Firm:
Tetsuo Kobayashi