Title:
Polish device
Document Type and Number:
Japanese Patent JP5992856
Kind Code:
B2
Inventors:
Seiya Ushimaru
Tomohiro Tanaka
Chuichi Sone
Tomohiro Tanaka
Chuichi Sone
Application Number:
JP2013071773A
Publication Date:
September 14, 2016
Filing Date:
March 29, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B37/00; H01L21/304
Domestic Patent References:
| JP3753569B2 | ||||
| JP2004174612A | ||||
| JP10277924A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa
Previous Patent: A curtain air bag device and its attaching structure
Next Patent: DEVICE FOR CHANGING DIRECTION OF CONVEYANCE OF STRIP
Next Patent: DEVICE FOR CHANGING DIRECTION OF CONVEYANCE OF STRIP