Title:
Polish device
Document Type and Number:
Japanese Patent JP6092086
Kind Code:
B2
Inventors:
Hiroyuki Shinozaki
Application Number:
JP2013248945A
Publication Date:
March 08, 2017
Filing Date:
December 02, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B37/30; B24B37/10; H01L21/304
Domestic Patent References:
| JP2005081507A | ||||
| JP10118917A | ||||
| JP2010046756A | ||||
| JP2003186549A | ||||
| JP2001105298A | ||||
| JP2010050436A | ||||
| JP11070468A | ||||
| JP2001310257A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa