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Patent Searching and Data


Title:
Polish device
Document Type and Number:
Japanese Patent JP6092086
Kind Code:
B2
Inventors:
篠崎 弘行
Application Number:
JP2013248945A
Publication Date:
March 08, 2017
Filing Date:
December 02, 2013
Export Citation:
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Assignee:
株式会社荏原製作所
International Classes:
B24B37/30; B24B37/10; H01L21/304
Domestic Patent References:
JP2005081507A
JP10118917A
JP2010046756A
JP2003186549A
JP2001105298A
JP2010050436A
JP11070468A
JP2001310257A
Attorney, Agent or Firm:
渡邉 勇
廣澤 哲也