Title:
Polishing liquid for metal and polishing method
Document Type and Number:
Japanese Patent JP6334172
Kind Code:
B2
Inventors:
Yasuhiro Ichige
Koji Haga
Seiichi Kondo
Koji Haga
Seiichi Kondo
Application Number:
JP2013556408A
Publication Date:
May 30, 2018
Filing Date:
January 29, 2013
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
C09K3/14; B24B37/00; C09G1/02; H01L21/304
Domestic Patent References:
| JP2007150264A | ||||
| JP200773548A | ||||
| JP2011119380A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
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