Title:
POLISHER, POLISHING TOOL AND MANUFACTURING METHOD OF POLISHER
Document Type and Number:
Japanese Patent JP2007030073
Kind Code:
A
Abstract:
To provide a polisher, simply separating abrasive cloth from a polisher head, and preventing the abrasive cloth from being peeled off from the polisher head by mistake in the course of polishing.
This polisher includes: a dome-shaped polisher head 31 formed of elastic material; and a polishing pad 32 provided on the surface of the polisher head 31 through a pressure sensitive adhesive layer and having a polishing pad 32. Plasma is applied to the surface of the polisher head 31. The surface of the polisher head 31 is modified to obtain the cleaning effect for removing stains, and the roughening effect for forming the rugged shaped on the surface.
Inventors:
IHARA MASAKI
TAKADA KEISUKE
TAKADA KEISUKE
Application Number:
JP2005214187A
Publication Date:
February 08, 2007
Filing Date:
July 25, 2005
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B24B13/01; B24D9/04
Attorney, Agent or Firm:
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
Kanji Nakayama
Tsuyoshi Ishizaki