Title:
POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2015089597
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a polishing device which uniformly polishes an entire surface of a polishing object while maintaining a high polishing rate.SOLUTION: A polishing device includes: a holder which holds a polishing object; an upper surface plate 120 having a polishing surface 121 facing an upper surface of the polishing object; and a lower surface plate having a polishing surface facing a lower surface of the polishing object. Multiple lateral grooves 122, multiple vertical grooves 123 which extend along a direction perpendicular to the lateral grooves 122, and multiple abrasive grain supply ports 124 which communicate with the lateral grooves 122 and the vertical grooves 123 are formed on the polishing surface 121.
Inventors:
KABAYAMA KAZUNORI
Application Number:
JP2013229875A
Publication Date:
May 11, 2015
Filing Date:
November 06, 2013
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
B24B37/16; B24B37/00; B24B37/08; B24B37/12; B24B57/02; H01L21/304
Attorney, Agent or Firm:
Tomohiro Mori
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