Title:
POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2783072
Kind Code:
B2
Abstract:
PURPOSE: To integrate sensors capable of invariably monitoring the state and quickly detecting the abnormal state without enlarging a tool holding section in a polishing device having the automatic tool hanging function and the floating holding function.
CONSTITUTION: The opening of the first air discharge passage 9a and the opening of the second air discharge passage 9b are provided at the preset positions of the outside member of a double cylinder 4, a blocking member 9c moved after a large-diameter cylinder 5 is provided, and orifices and differential pressure switches are provided in response to both air discharge passages 9a, 9b.
Inventors:
YAMASHITA MASANORI
YAMAMOTO SEIGO
YAMAMOTO SEIGO
Application Number:
JP21466392A
Publication Date:
August 06, 1998
Filing Date:
July 19, 1992
Export Citation:
Assignee:
DAIKIN KOGYO KK
International Classes:
B23Q17/00; B23B31/00; B23B31/02; B23B31/08; B23Q17/09; B24B45/00; B24B49/00; B24B49/08; (IPC1-7): B24B49/00; B23B31/02; B23Q17/00; B24B49/08
Domestic Patent References:
| JP3166053A | ||||
| JP2122758U | ||||
| JP63110349U | ||||
| JP61175343U | ||||
| JP6185341U | ||||
| JP4914585U | ||||
| JP3811499B1 | ||||
| JP465677B1 |
Attorney, Agent or Firm:
Tsugawa friend