To prolong the service life of a polishing machine and a polishing dresser in the polishing dresser polishing the polishing machine of a chemical machine polisher.
In this polishing dresser 15 polishing the polishing machine of the chemical machine polisher polishing a surface of an object to be polished on the polishing machine by supplying chemical abrasive to a machine face of the flat and rotatable polishing machine, brush bristles 30 made of hard resin fibers or synthetic fibers having resistance against chemical abrasive are substantially uniformly inplanted as polishing members in a predetermined region of a surface of a base member 29 like a flat panel formed by resin having resistance against chemical abrasive to constitute a polishing brush. The service life of the polishing machine and the polishing dresser 15 can be prolonged by polishing by this polishing brush.
JPH08255775A | 1996-10-01 | |||
JPH11300600A | 1999-11-02 |
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