Title:
研磨装置及び研磨方法
Document Type and Number:
Japanese Patent JP5197046
Kind Code:
B2
Inventors:
Miyazaki Takashi
Eiji Sahoda
Eiji Sahoda
Application Number:
JP2008033179A
Publication Date:
May 15, 2013
Filing Date:
February 14, 2008
Export Citation:
Assignee:
Hitachi Computer Equipment Co., Ltd.
International Classes:
B24B37/005; B24B49/04; B24B49/08; B24B49/16; G11B5/31
Domestic Patent References:
| JP2007232134A | ||||
| JP2142966A | ||||
| JP7091530A |
Attorney, Agent or Firm:
Minoru Hayashi
Patent business corporation Protech
Patent business corporation Protech