Title:
研磨装置
Document Type and Number:
Japanese Patent JP5170642
Kind Code:
B2
Inventors:
Akira Inogawa
Susumu Hoshino
Susumu Hoshino
Application Number:
JP2008013142A
Publication Date:
March 27, 2013
Filing Date:
January 23, 2008
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
B24B37/34; B24B37/04; B24B37/10; H01L21/304
Domestic Patent References:
| JP2007245298A | ||||
| JP27589A1 | ||||
| JP5177533A | ||||
| JP2004349444A | ||||
| JP2007324458A |
Attorney, Agent or Firm:
Masago Onishi