Title:
研磨装置
Document Type and Number:
Japanese Patent JP5511343
Kind Code:
B2
Inventors:
Atsushi Takada
Masakazu Takatsu
Upper row Kazuki
Yoshitaka Tsuruta
Masakazu Takatsu
Upper row Kazuki
Yoshitaka Tsuruta
Application Number:
JP2009279249A
Publication Date:
June 04, 2014
Filing Date:
December 09, 2009
Export Citation:
Assignee:
Nanotem Co., Ltd.
International Classes:
B24B7/04; B24B7/17; B24B37/013; B24B37/12; B24B45/00; B24B55/02; H01L21/304
Domestic Patent References:
| JP2007015046A | ||||
| JP3049868A | ||||
| JP2005135936A | ||||
| JP2000094307A | ||||
| JP2003165050A | ||||
| JP2001176826A | ||||
| JP2003109922A |
Attorney, Agent or Firm:
Hayashi Tsunetoku
Kenji Doi
Koichiro Matsueda
Kenji Doi
Koichiro Matsueda