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Title:
POLISHING GRINDING WHEEL
Document Type and Number:
Japanese Patent JPH05138540
Kind Code:
A
Abstract:

PURPOSE: To provide a polishing grinder which is capable of detecting from abnormalities of a work surface to be polished that the actual abrasion quantity of the grinder reaches the allowable abrasion quantity in an easy and simple manner in the improvement of the structure of the polishinggrinder to be used in a polishing device.

CONSTITUTION: In a polishing grinder to be used in a polishing device where a work to be polished is loaded on the surface of a loading table of the polishing device, a polishing grinding wheel 3 where a grinding wheel 3b is fixed to a base plate 3a is fixed to a grinder holder of this polishing device, and the surface of this work to be polished is polished by this polishing grinder 3 by bringing this grinding wheel 3b of this polishing grinder 3 into contact with the worl to be polished while rotating the grinder holder, an arrangement is made so that a protruded part 3c embedded in this grinder 3b above the contact surface between the grinder 3b and the base plate 3a may be included within this grinding wheel 3b.


Inventors:
NAKAGAMI SHOICHIRO
Application Number:
JP30312691A
Publication Date:
June 01, 1993
Filing Date:
November 19, 1991
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
B24D7/00; H01L21/304; (IPC1-7): B24D7/00; H01L21/304
Attorney, Agent or Firm:
Teiichi



 
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