Title:
金属用研磨液及び研磨方法
Document Type and Number:
Japanese Patent JP4164941
Kind Code:
B2
Inventors:
Yasuo Kami
Tsuyoshi Uchida
Hiroki Terasaki
Tsuyoshi Uchida
Hiroki Terasaki
Application Number:
JP14837999A
Publication Date:
October 15, 2008
Filing Date:
May 27, 1999
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14; C09K13/06; C23F1/16; H01L21/308
Domestic Patent References:
| JP1121546A | ||||
| JP2158684A | ||||
| JP2002519475A | ||||
| JP2002528903A | ||||
| JP200185372A | ||||
| JP11135466A | ||||
| JP1044047A | ||||
| JP2000150435A |
Foreign References:
| WO2000039844A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi