Title:
金属用研磨液及びそれを用いた基板の研磨方法
Document Type and Number:
Japanese Patent JP4683681
Kind Code:
B2
Inventors:
Yasushi Kurata
Yasuo Kami
Tsuyoshi Uchida
Hiroki Terasaki
Akiko Igarashi
Yasuo Kami
Tsuyoshi Uchida
Hiroki Terasaki
Akiko Igarashi
Application Number:
JP30866699A
Publication Date:
May 18, 2011
Filing Date:
October 29, 1999
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14; C09K13/00
Domestic Patent References:
| JP1121546A | ||||
| JP11195628A |
Attorney, Agent or Firm:
Hidekazu Miyoshi