Title:
POLISHING MEMBER
Document Type and Number:
Japanese Patent JP2020163476
Kind Code:
A
Abstract:
To provide a polishing member capable of improving uniformity of roughness of a polishing surface of a polishing object.SOLUTION: A polishing member is for polishing a target object, and includes a base material and a plurality of polishing parts having a three-dimentional structure that projects from one main surface of the base material to form an apex and being arranged according to a regular pattern. The three-dimentional structure of the polishing part is constituted of a triangular pyramid having a bottom angle of a bottom part being an isosceles pyramid showing θ1, and the plurality of polishing parts are arranged with a constant arrangement pattern along an arrangement direction on the main surface. Multiple arrangement patterns of the polishing parts are arranged side by side in a parallel direction orthogonal to the arrangement direction. When set in a feeding direction in a direction along the main surface, the arrangement direction is inclined at an angle of 2° to (θ1-2°) or at an angle of (θ1+2°) to 88°.SELECTED DRAWING: Figure 4
Inventors:
NAKAMURA YOKO
YAMAZAKI YASUSHI
NAGABUCHI NAOHIRO
OKADA MICHIHIKO
TASAKA YOSHIHIKO
KAWAI RYOGO
YAMAZAKI YASUSHI
NAGABUCHI NAOHIRO
OKADA MICHIHIKO
TASAKA YOSHIHIKO
KAWAI RYOGO
Application Number:
JP2019063394A
Publication Date:
October 08, 2020
Filing Date:
March 28, 2019
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES CO
International Classes:
B24D11/00
Attorney, Agent or Firm:
Yoshiki Hasegawa
Ikeda adult
Yoshinori Shimizu
Junichiro Sakamaki
Yasuki Yanagi
Ikeda adult
Yoshinori Shimizu
Junichiro Sakamaki
Yasuki Yanagi