Title:
研磨方法及び装置、露光装置、デバイス製造方法及びデバイス
Document Type and Number:
Japanese Patent JP3990901
Kind Code:
B2
Inventors:
Norihisa Saito
Junji Takashita
Hidenori Nakagawa
Manabu Andoh
Junji Takashita
Hidenori Nakagawa
Manabu Andoh
Application Number:
JP2001357216A
Publication Date:
October 17, 2007
Filing Date:
November 22, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
B24B1/00; B24B13/00; H01L21/027
Domestic Patent References:
| JP2000308950A | ||||
| JP5057606A | ||||
| JP2001281431A | ||||
| JP8019943A | ||||
| JP2000176811A | ||||
| JP1301048A | ||||
| JP2000237931A | ||||
| JP768456A |
Attorney, Agent or Firm:
Ryosuke Fujimoto