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Title:
POLISHING METHOD OF PLATE-LIKE OBJECT
Document Type and Number:
Japanese Patent JP2012222311
Kind Code:
A
Abstract:

To provide a polishing method which does not cause a chip in an outer periphery of a plate-like object and does not deteriorate flatness of a polished surface.

A polishing method of a plate-like object for polishing a rear surface of the plate-like object with a polishing pad having a polishing surface whose radius is greater than a diameter of the plate-like object comprises a holding step of holding a surface side of the plate-like object on a chuck table having a holding surface on which the plate-like object is held and a polishing step of polishing the plate-like object by rotating a spindle on which the polishing pad is installed with the entire rear surface of the plate-like object held on the chuck table being covered by a polishing surface of the polishing pad. In the polishing step, a rotational axis of the spindle and a rotational axis of the chuck table are relatively inclined so that the polishing surface and the holding surface relatively incline in a separation direction from a rotation center of the polishing pad toward the outside, and the plate-like object is polished.


Inventors:
LEE SEONG-KUN
Application Number:
JP2011089791A
Publication Date:
November 12, 2012
Filing Date:
April 14, 2011
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304; B24B29/00
Domestic Patent References:
JP2005262441A2005-09-29
JP2008279553A2008-11-20
JP2007319994A2007-12-13
JP2006175534A2006-07-06
JPH07297195A1995-11-10
JP2002346910A2002-12-04
JP2009090389A2009-04-30
JP2004356480A2004-12-16
Attorney, Agent or Firm:
Akira Matsumoto