Title:
研磨パッド及びその製造方法
Document Type and Number:
Japanese Patent JP5276502
Kind Code:
B2
Inventors:
Yoshiyuki Nakai
Kazuyuki Ogawa
Kenji Nakamura
Kazuyuki Ogawa
Kenji Nakamura
Application Number:
JP2009091397A
Publication Date:
August 28, 2013
Filing Date:
April 03, 2009
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO.,LTD.
International Classes:
B24B37/24; C08G18/10; H01L21/304
Domestic Patent References:
| JP2008060360A | ||||
| JP2008227394A | ||||
| JP2006110665A | ||||
| JP4128606B2 |
Foreign References:
| WO2008120578A1 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office