Title:
研磨パッド及び研磨パッドの製造方法
Document Type and Number:
Japanese Patent JP6465676
Kind Code:
B2
Inventors:
Takashi Saeki
Toshihide Maeda
Toshihide Maeda
Application Number:
JP2015017694A
Publication Date:
February 06, 2019
Filing Date:
January 30, 2015
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24D11/00; B24B37/22; B24D3/00; H01L21/304
Domestic Patent References:
| JP2002233962A | ||||
| JP6254772A | ||||
| JP2000000771A | ||||
| JP8294873A | ||||
| JP2005177945A | ||||
| JP2012101342A | ||||
| JP2013230535A | ||||
| JP2002158197A | ||||
| JP2008194761A | ||||
| JP2002172563A |
Foreign References:
| US20140242893 |
Attorney, Agent or Firm:
Junichi Omori
Mitsuru Takahashi
Ori Akira
Masayoshi Sekine
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Chiba Ayako
Shiraka Tomohisa
Mitsuru Takahashi
Ori Akira
Masayoshi Sekine
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Chiba Ayako
Shiraka Tomohisa