Title:
研磨スラリーの供給方法及び供給装置、並びに研磨装置
Document Type and Number:
Japanese Patent JP5803601
Kind Code:
B2
Inventors:
Michito Sato
Masumura Shou
Masumura Shou
Application Number:
JP2011252585A
Publication Date:
November 04, 2015
Filing Date:
November 18, 2011
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/304; B24B37/00; B24B57/02
Domestic Patent References:
| JP2005313266A | ||||
| JP2002319556A | ||||
| JP2002172562A | ||||
| JP2000233371A | ||||
| JP11126764A | ||||
| JP11138439A |
Attorney, Agent or Firm:
Mikio Yoshimiya